Ion Implantation Science & Technology (with annealing) School

Ahead of the 23rd International Conference on Ion Implantation Technology, a three-day school on fundamental and practical aspects of ion implantation and annealing operations in research and IC production environments is taking place from 22-24 September 2022 in San Diego, CA, USA.

Topics covered in the IIT 2022 school include:

  • History of Integrated Circuits and Ion Implantation
  • Ion Implantation: Current and Future CMOS ICs
  • Commercial Ion Implantation Systems
  • Analytic Techniques for Ion Implantation
  • Science of Ion Implantation Damage and Annealing
  • Annealing Process for Ion Implanted Si, Ge, SiC and GaN
  • Cluster Ion Beams: History and Technology
  • Fundamentals of Ion Implantation Beamline Design
  • Source Physics and Maintenance
  • Safety Considerations in Ion Implantation
  • Ion Beam Purity and Elemental Contamination
  • Advanced Ion Implant Applications for CMOS Devices
  • Ion Implantation in Power Devices, new Base Materials and Solar Cells
  • High Performance CMOS: 7 nm & Beyond

More information can be found at

The event is finished.


Sep 22 - 24 2022


All Day

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San Diego, CA, USA
San Diego, CA, USA
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About launched on 01 January 2019 with ion beam facilities taking part in the RADIATE project. Other (European) facilities are invited to be featured on as well to showcase European know-how and expertise in the field of ion beam physics.

This project has received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 824096

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