Ion Implantation Science & Technology (with annealing) School
Ahead of the 23rd International Conference on Ion Implantation Technology, a three-day school on fundamental and practical aspects of ion implantation and annealing operations in research and IC production environments is taking place from 22-24 September 2022 in San Diego, CA, USA.
Topics covered in the IIT 2022 school include:
- History of Integrated Circuits and Ion Implantation
- Ion Implantation: Current and Future CMOS ICs
- Commercial Ion Implantation Systems
- Analytic Techniques for Ion Implantation
- Science of Ion Implantation Damage and Annealing
- Annealing Process for Ion Implanted Si, Ge, SiC and GaN
- Cluster Ion Beams: History and Technology
- Fundamentals of Ion Implantation Beamline Design
- Source Physics and Maintenance
- Safety Considerations in Ion Implantation
- Ion Beam Purity and Elemental Contamination
- Advanced Ion Implant Applications for CMOS Devices
- Ion Implantation in Power Devices, new Base Materials and Solar Cells
- High Performance CMOS: 7 nm & Beyond
More information can be found at https://www.mrs.org/iit2022/school