INSP (CNRS), France

The Centre National de la Recherche Scientifique (CNRS) is a public organization under the responsibility of the French Ministry of Education and Research. The Institut des NanoSciences de Paris (INSP) is a CNRS-UPMC mixed research unit at Sorbonne Université. The SAFIR (Système d’Analyse par Faisceaux d’Ions Rapides) platform of INSP is based around a single-ended 2.5 MV Van de Graaff with very beam energy resolution. Together with light ion implantation, all standard IBA techniques (RBS, NRA, PIXE, He-ERDA) are available, and in addition the SAFIR team is very experienced in stable isotopic tracing studies of thin film growth and reactions, using NRA and in particular high resolution narrow nuclear resonance depth profiling. Specialised furnaces for handling rare isotopically enriched gases are available. New facilities include a Medium energy on scattering system with UHV-connected surface preparation and diagnostics (evaporators, ion gun, LEED/Auger…), and the recently presented use of Kossel diffraction for studies of nm period multilayers with PIXE.

 

IBA at CNRS-UPMC:

Method	Elements	Detection limit [at%]	Resolution depth	Resolution lateral
RBS, channeling	O - U	0.1	10 nm	0.5 mm
ERD	1H, 2H	1	10 nm	2x0.5 mm
PIXE	Na-U	0,01
PIXE-Kossel (nm periodic multilayers)	Na-U		sub-nm	1 mm
PIGE	Li-P	0,01		0.5 mm
Standard	H-Si	variable, ~1%	50 nm	0.5 mm
Resonances	13C, 15N 18O, 19F, 24Na, 26Mg, 27Al, 29,30Si	0,001	2-10 nm	0.5 mm
MEIS	C-U	0,1	1 nm	0,5

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