INSP (CNRS), France

The Centre National de la Recherche Scientifique (CNRS) is a public organization under the responsibility of the French Ministry of Education and Research. The Institut des NanoSciences de Paris (INSP) is a CNRS-UPMC mixed research unit at Sorbonne Université. The SAFIR (Système d’Analyse par Faisceaux d’Ions Rapides) platform of INSP is based around a single-ended 2.5 MV Van de Graaff with very beam energy resolution. Together with light ion implantation, all standard IBA techniques (RBS, NRA, PIXE, He-ERDA) are available, and in addition the SAFIR team is very experienced in stable isotopic tracing studies of thin film growth and reactions, using NRA and in particular high resolution narrow nuclear resonance depth profiling. Specialised furnaces for handling rare isotopically enriched gases are available. New facilities include a Medium energy on scattering system with UHV-connected surface preparation and diagnostics (evaporators, ion gun, LEED/Auger…), and the recently presented use of Kossel diffraction for studies of nm period multilayers with PIXE.


INSP’s main areas of competence:

  • ion-matter interactions
  • condensed matter and solid state physics
  • IBA, in particular for nanometric systems

Role in RADIATE:

    • leader of joint research activity task: “High-resolution X-ray detectors” CNRS is combining CIMAP’s expertise of low-energy microbeam optics with INSP’s expertise of X-ray, detectors, multidetector arrangements, and data processing


MethodElementsDetection limit [at%]Resolution depthResolution lateral
RBS, channelingO - U0.110 nm0.5 mm
ERD1H, 2H110 nm2x0.5 mm
(nm periodic
Na-Usub-nm1 mm
PIGELi-P0,010.5 mm
StandardH-Sivariable, ~1%50 nm0.5 mm
Resonances13C, 15N 18O,
19F, 24Na, 26Mg, 27Al, 29,30Si
0,0012-10 nm0.5 mm
MEISC-U0,11 nm0,5


The beamlines and chambers of SAFIR (INSP)  © INSP J.-J. GanemThe MEIS system of SAFIR (INSP) © INSP J.-J. GanemSpecialised silica tube furnace for treatment with rare isotopically enriched gases such as 18O2, 13C18O, D218O etc © INSP J.-J. Ganem




Centre National de la recherche scientifique CNRS
Rue Michel Ange 3
75794 Paris

Institut des Nanosciences de Paris (INSP)
Sorbonne Université
4 Place Jussieu
75005 Paris

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