HZDR, Germany

The Helmholtz-Zentrum Dresden-Rossendorf e.V. (HZDR) is a non-profit research organisation and a member of the “Helmholtz Association of German Research Centers”. With around 1200 employees, it is the largest research institution in the German Federal State of Saxony and is funded by the Federal and Saxonian Governments. The eight institutes of HZDR are active in application-oriented basic research, which is focused on three major research topics: Matter, Energy, and Health.

HZDR’s Institute of Ion Beam Physics and Materials Research operates the Ion Beam Center (IBC), which represents one of the worldwide leading infrastructures for the investigation of ion-materials interaction and the application of ion technologies in research and industry. With more than 40 end-stations the IBC provides ion beams of almost all stable elements in a wide energy range from eV to 60 MeV.

The IBC has profound scientific and technical expertise in surface processing by low-energy / highly-charged ions (LEI/HCI) or focused ion beams (FIB), ion beam modification of materials by ion implantation and irradiation, ion beam analysis (IBA), as well as accelerator mass spectrometry (AMS).

The IBC offers IBA set-ups for in-situ (partly real-time) thin film studies and an ion microprobe for chemical imaging of large samples with adaptable spatial resolution. Other highlights are a double beamline and an ion microscope (ORION Nanolab) for high-resolution imaging and nanofabrication.


IBC’s main areas of competence:

  • Ion beam interaction with materials
  • Ion beam modification of materials
  • Ion-induced self-organization of nanostructures
  • Ion-induced ordering/disordering effects
  • Ion beam analysis
  • Accelerator mass spectrometry

Role in RADIATE:

  • project coordinator
  • central management of transnational access
  • management of ionbeamcenters.eu / ionbeams.eu website
  • providing transnational access to users
  • networking activities
  • contributing to joint research activities

Ion Implantation / Irradiation:

Ion speciesH - Bi (stable nuclides, poly-atomic ions)
Ion energy100 eV - 60 MeV
Depth rangefew Å - 150 µm
Fluence107 - 1018 cm-2
Incidence angleStandard 0°, 7°; others on request
Beam currentnA - mA
Sample sizeSmall pieces (cm2) - Ø 200 mm wafers
Temperature Liquid nitrogen - 1100°C
Special featuresDual beam irradiation, fluence gradients, defined partial gas pressures

Ion Beam Analysis:

MethodElementsDetection limit [at%]Resolution depthResolution lateral
RBSO - U0.110 nm0.5 mm
HR-RBSAl-U12 nm1 mm
ERDH, B-Si0.115 nm1.5 mm


1 mm
3 µm
NRAH, B, C, N, F, O, …0.025 nm0.5 mm

Accelerator Mass Spectrometry:

Nuclidet 1/2 [Ma]Nuclide ratios of samples [10-12]Machine blank level [10-16]
7Be1.5x10-7(0.01 - 2) 7Be / 9Be3
10Be1.387(0.01 - 300) 10Be / 9Be5
26AI0.705(0.001 - 60) 26AI / 27AI5
36CI0.301(0.007 - 700) 36CI / 35CI4
41Ca0.104(0.006 - 9000) 41Ca / 40Ca20
129I15.7(0.5 - 200) 129I / 127I200

Focused Ion Beam:

ParameterCross BeamTM Nvision 40Ion Microscope ORION NanofabMass-separated CANION 31M+
Ion speciesGaHe, NeSi, Ge, Co, Ni, Nd, Er, Au, Bi, …
Energy 5 - 30 keV10 - 30 keV10 - 60 keV
Beam currentspA - nApA pA - nA
Resolution7 nm (@ 1 pA)0.5 nm (He)
2.0 nm (Ne)
15 - 100 nm
Special featuresTEM lamella preparationHeating: 500°C, 4-probe current measurementsHeating: 500°C, laser interferometer

Low Energy Ions:

Ion species
Gas ions (H - Xe)
Ion energy20 eV - 20 keV
Charge state1+
Ion flux1013 - 1015 cm-2s-1

Highly-Charged Ions:

Ion species
Noble gases
Ion energy20 eV - 20 keV
Charge state3+ - 45+
Ion flux109 - 1012 cm-2s-1





Helmholtz-Zentrum Dresden-Rossendorf e.V.
Institute of Ion Beam Physics and Materials Research
Bautzner Landstr. 400
01328 Dresden