The Helmholtz-Zentrum Dresden-Rossendorf e.V. (HZDR) is a non-profit research organisation and a member of the “Helmholtz Association of German Research Centers”. With around 1200 employees, it is the largest research institution in the German Federal State of Saxony and is funded by the Federal and Saxonian Governments. The eight institutes of HZDR are active in application-oriented basic research, which is focused on three major research topics: Matter, Energy, and Health.
HZDR’s Institute of Ion Beam Physics and Materials Research operates the Ion Beam Center (IBC), which represents one of the worldwide leading infrastructures for the investigation of ion-materials interaction and the application of ion technologies in research and industry. With more than 40 end-stations the IBC provides ion beams of almost all stable elements in a wide energy range from eV to 60 MeV.
The IBC has profound scientific and technical expertise in surface processing by low-energy / highly-charged ions (LEI/HCI) or focused ion beams (FIB), ion beam modification of materials by ion implantation and irradiation, ion beam analysis (IBA), as well as accelerator mass spectrometry (AMS).
The IBC offers IBA set-ups for in-situ (partly real-time) thin film studies and an ion microprobe for chemical imaging of large samples with adaptable spatial resolution. Other highlights include an ion microscope (ORION Nanolab) for high-resolution imaging and nanofabrication.
IBC’s main areas of competence:
- Ion beam interaction with materials
- Ion beam modification of materials
- Ion-induced self-organization of nanostructures
- Ion-induced ordering/disordering effects
- Ion beam analysis
- Accelerator mass spectrometry
Role in RADIATE:
- project coordinator
- central management of transnational access
- management of ionbeamcenters.eu / ionbeams.eu website
- providing transnational access to users
- networking activities
- contributing to joint research activities
Ion Implantation / Irradiation:
| Parameter | Description |
|---|---|
| Ion species | H - Bi (stable nuclides, poly-atomic ions) |
| Ion energy | 100 eV - 60 MeV |
| Depth range | few Å - 150 µm |
| Fluence | 107 - 1018 cm-2 |
| Incidence angle | Standard 0°, 7°; others on request |
| Beam current | nA - mA |
| Sample size | Small pieces (cm2) - Ø 200 mm wafers |
| Temperature | Liquid nitrogen - 1100°C |
| Special features | fluence gradients, defined partial gas pressures |
Ion Beam Analysis:
| Method | Elements | Detection limit [at%] | Resolution depth | Resolution lateral |
|---|---|---|---|---|
| RBS | O - U | 0.1 | 10 nm | 0.5 mm |
| HR-RBS | Al-U | 1 | 2 nm | 1 mm |
| ERD | H, B-Si | 0.1 | 15 nm | 1.5 mm |
| PIXE PIGE Standard µ-Probe | Si-U Li-P | 0.001 0.01 | - - | 1 mm 3 µm |
| NRA | H, B, C, N, F, O, … | 0.02 | 5 nm | 0.5 mm |
Accelerator Mass Spectrometry:
| Nuclide | t 1/2 [Ma] | Nuclide ratios of samples [10-12] | Machine blank level [10-16] |
|---|---|---|---|
| 7Be | 1.5x10-7 | (0.01 - 2) 7Be / 9Be | 3 |
| 10Be | 1.387 | (0.01 - 300) 10Be / 9Be | 5 |
| 26AI | 0.705 | (0.001 - 60) 26AI / 27AI | 5 |
| 36CI | 0.301 | (0.007 - 700) 36CI / 35CI | 4 |
| 41Ca | 0.104 | (0.006 - 9000) 41Ca / 40Ca | 20 |
| 129I | 15.7 | (0.5 - 200) 129I / 127I | 200 |
Focused Ion Beam:
| Parameter | Cross BeamTM Nvision 40 | Ion Microscope ORION Nanofab | Mass-separated CANION 31M+ |
|---|---|---|---|
| Ion species | Ga | He, Ne | Si, Ge, Co, Ni, Nd, Er, Au, Bi, … |
| Energy | 5 - 30 keV | 10 - 30 keV | 10 - 60 keV |
| Beam currents | pA - nA | pA | pA - nA |
| Resolution | 7 nm (@ 1 pA) | 0.5 nm (He) 2.0 nm (Ne) | 15 - 100 nm |
| Special features | TEM lamella preparation | Heating: 500°C, 4-probe current measurements | Heating: 500°C, laser interferometer |
Low Energy Ions:
| Parameter | Value |
|---|---|
| Ion species | Gas ions (H - Xe) |
| Ion energy | 20 eV - 20 keV |
| Charge state | 1+ |
| Ion flux | 1013 - 1015 cm-2s-1 |
Highly-Charged Ions:
| Parameter | Value |
|---|---|
| Ion species | Noble gases |
| Ion energy | 20 eV - 20 keV |
| Charge state | 3+ - 45+ |
| Ion flux | 109 - 1012 cm-2s-1 |
Photos:
Address:
Helmholtz-Zentrum Dresden-Rossendorf e.V.
Institute of Ion Beam Physics and Materials Research
Bautzner Landstr. 400
01328 Dresden
Germany